Using a mesh grid bias method for plasma parameter control, volume production of hydrogen negative ions H" is studied in pure hydrogen rf plasmas. Relationship between the extracted H" ion currents and plasma parameters is discussed. Both high and...
Novel Materials Processing by Advanced Electromagnetic Energy Sources 55-58 2005年 [査読有り]
This chapter discusses the varying magnetic field intensity of the magnetic field (MF), plasma parameter control in hydrogen (H2), deuterium (D2) plasmas, and its influence on H/D production. The relationship between H/D density distribution and p...
Tauchi Y.   Fukumasa O.   Hamabe M.   Takeiri Y.   
IEEE International Conference on Plasma Science 2003年6月 Institute of Electrical and Electronics Engineers
In a volume negative ion source, H/sup -/ ions are formed in hydrogen plasmas by dissociative attachment of slow plasma electrons to highly vibrationally excited hydrogen molecules, and these vibrational molecules are produced by energetic electro...