An asymmetric plasma divided by a magnetic filter is numerically simulated by the one-dimensional particle-in-cell code VSIM1D [Koga et al., J. Phys. Soc. Jpn. 68, 1578 (1999)]. Depending on the asymmetry, the system behavior is static or dynamic....
Japanese journal of applied physics. Pt. 1, Regular papers & short notes 7B 4593-4596 1997年7月
Plasma parameters (CH_4/H_2+Ar plasmas) are spatially well controlled using a movable magnetic filter. At any filter position, plasma parameters change dramatically across the magnetic filter. The plasma is divided into two parts, the source plasm...